A cost competitive digital holographic microscope for high precision 3D imaging and measurement of microstructures (1-1000 mm) in real-time. The technique used is non-destructive and non-intrusive to the samples. The system has been applied to look at the morphology of living cells (marker-free) as well as for the inspection of micro-lens array. Digital holographic microscopy (DHM) is a novel solution for quantitative measurement applications in life science, micro-optics, micro-fluidics, MEMS/MOEMS, etc.
The technology consists of a series of proprietary steps to do physical aberration compensation of the digital holographic microscope, giving it the robustness and stability required for measurements.
Lateral resolution: microscope objective (MO) dependent (< 600 nm for 50X MO)
Axial resolution : < 40 nm
Field of view : MO dependent (can be up to 2 mm × 2.5 mm)
Working distance: MO dependent (typically from 3 mm to 22.5 mm)
Grabbing time(1 hologram): 15 images/s
Spatial sampling : 1280 × 960 pixels (hologram)
This technology is applicable in the following industries:
Microlens characterization for camera phones