Digital Holographic Microscope

Technology Overview

A cost competitive digital holographic microscope for high precision 3D imaging and measurement of microstructures (1-1000 mm) in real-time. The technique used is non-destructive and non-intrusive to the samples. The system has been applied to look at the morphology of living cells (marker-free) as well as for the inspection of micro-lens array. Digital holographic microscopy (DHM) is a novel solution for quantitative measurement applications in life science, micro-optics, micro-fluidics, MEMS/MOEMS, etc.

Technology Features & Specifications

The technology consists of a series of proprietary steps to do physical aberration compensation of the digital holographic microscope, giving it the robustness and stability required for measurements.


Lateral resolution:  microscope objective (MO) dependent (< 600 nm for 50X MO)

Axial resolution    :   < 40 nm

Field of view         :  MO dependent (can be up to 2 mm × 2.5 mm)

Working distance:  MO dependent (typically from 3 mm to 22.5 mm)

Grabbing time(1 hologram):   15 images/s

Spatial sampling                    :  1280 × 960 pixels (hologram)

Potential Applications

This technology is applicable in the following industries:

Life Sciences

  • Dynamic cell morphology


  • Microlenses
  • Diffractive optics


  • Cantilevers
  • Micromirrors
  • Accelerometers


  • Surface scratches and defect detection
  • Wafer planarity


  • Topographic changes induced by electrical or magnetic fields or temperature changes
  • Refractive index changes



Market Trends and Opportunities

Microlens characterization for camera phones

MEMS fabrication

Microstructures Inspection

Customer Benefits

  • Low cost
  • 3D quantitative measurements
  • High resolution
  • Non-contact and non-invasiveness
  • High speed
  • Ease of use
  • Robustness and stability

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